PZT

Piezoelectric Thin Film Sputtering Service

PZT has high piezoelectric constant and its thin film can be patterned finely making it ideal for MEMS sensors.

High Reliability - mass production experience (1,000,000 per year) brings stable quality.
Quick Delivery - Please contact us to discuss your required schedule.
Small Volume Welcomed - Single wafer prototyping available.
Reasonable Cost - Please contact us for a quotation.

Sputtering Specification

Specification	Material	PZT thin film
	PZT film thickness	1-5μｍ
	Relative Permittivity εr	900*
	Piezoelectric Constant d31	220 pm/V*
	Wafer Size	4•5•6•8 inch
	Wafers	Si wafer or SOI wafer
Available processes		PZT Sputtering, Lower & Upper electrode sputtering, Precise patterning
Inspection	Film thickness	Film thickness measurement by SEM
	Orientation	Axis inspection with XRD
	Composition	XRF

*The above Relative Permittivity εr and Piezoelectric Constant d31 are typical values for 3μm thickness PZT after Polarization

Typical Applications

• Accelerometers
• Inkjet Heads
• MEMS Microphone
• Micropump
• Gyro
• RF-MEMS
• Ultrasonic Sensor
• MEMS Mirror
• Energy Harvester