PZT has high piezoelectric constant and its thin film can be patterned finely making it ideal for MEMS sensors.
High Reliability - mass production experience (1,000,000 per year) brings stable quality.
Quick Delivery - Please contact us to discuss your required schedule.
Small Volume Welcomed - Single wafer prototyping available.
Reasonable Cost - Please contact us for a quotation.
Specification | Material | PZT thin film |
---|---|---|
PZT film thickness | 1-5μm | |
Relative Permittivity εr | 900* | |
Piezoelectric Constant d31 | 220 pm/V* | |
Wafer Size | 4•5•6•8 inch | |
Wafers | Si wafer or SOI wafer | |
Available processes | PZT Sputtering, Lower & Upper electrode sputtering, Precise patterning | |
Inspection | Film thickness | Film thickness measurement by SEM |
Orientation | Axis inspection with XRD | |
Composition | XRF |
*The above Relative Permittivity εr and Piezoelectric Constant d31 are typical values for 3μm thickness PZT after Polarization