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PZT

Piezoelectric Thin Film Sputtering Service

PZT has high piezoelectric constant and its thin film can be patterned finely making it ideal for MEMS sensors.

High Reliability - mass production experience (1,000,000 per year) brings stable quality.
Quick Delivery - Please contact us to discuss your required schedule.
Small Volume Welcomed - Single wafer prototyping available.
Reasonable Cost - Please contact us for a quotation.

Sputtering Specification

SpecificationMaterialPZT thin film
PZT film thickness1-5μm
Relative Permittivity εr900*
Piezoelectric Constant d31220 pm/V*
Wafer Size4•5•6•8 inch
WafersSi wafer or SOI wafer
Available processesPZT Sputtering, Lower & Upper electrode sputtering, Precise patterning
InspectionFilm thicknessFilm thickness measurement by SEM
OrientationAxis inspection with XRD
CompositionXRF

*The above Relative Permittivity εr and Piezoelectric Constant d31 are typical values for 3μm thickness PZT after Polarization

Typical Applications

  • Accelerometers
  • Inkjet Heads
  • MEMS Microphone
  • Micropump
  • Gyro
  • RF-MEMS
  • Ultrasonic Sensor
  • MEMS Mirror
  • Energy Harvester

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