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MEMS Gyro Experience

Silicon Sensing has delivered approaching 30,000,000 high performance inertial MEMS gyroscopes and accelerometers to thousands of satisfied customers since the company was formed back in 1999.  These high integrity sensors have all been designed, developed and manufactured in-house by Silicon Sensing.

The technology developed for these sensors has evolved and Silicon Sensing’s experience with the three generations of product has increased the scope of process capability in its foundry in Japan, thereby offering customers a wider range of available services.  These are summarised below.

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Photolithography ICP Etching (SR, HRM) Anodic Welding (Atmosphere)

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Piezoelectric Thin Film Sputtering Equipment Ion Milling Wafer Grinding Equipment

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Aligner (both sides) Spray Coater ICP Etching (Pegasus)

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