CAS200 Series (In-plane) Dual-axis MEMS Accelerometers

High performance dual-axis linear acceleration measurement in a small surface mounted package.

Gemini® is a new family of integrated MEMS accelerometers from Silicon Sensing, comprising a dual-axis MEMS sensing device with a dedicated control ASIC in a single ceramic LCC package. Sensor data is output via analogue and digital (SPI®) interfaces.

The CAS200 series of parts provides two in-plane axes of linear acceleration sensing and is available in five different dynamic ranges.  CAS 21x series accelerometers are aligned flat to their PCB.

CAS200 is supplied as a PCBA surface mountable standard LCC ceramic packaged device, which is hermetically sealed providing full environmental protection. Precise linear acceleration sensing is achieved by a Silicon MEMS detector forming an orthogonal pair of sprung masses. Each mass provides the moving plate of a variable capacitance formed by an array of interlaced ‘fingers’. This structure also provides critical damping to prevent resonant gain. Linear acceleration results in a change of capacitance which is measured by demodulation of the square wave excitation.

Product Lifecycle Status

Production Status: In Production

Availability: Available
Customer Applications: New and existing applications

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