PZT has high piezoelectric constant and its thin film can be patterned finely making it ideal for MEMS sensors.
High Reliability - mass production experience (1,000,000 per year) brings stable quality.
Quick Delivery - Please contact us to discuss your required schedule.
Small Volume Welcomed - Single wafer prototyping available.
Reasonable Cost - Please contact us for a quotation.
|Specification||Material||PZT thin film|
|PZT film thickness||1-5μｍ|
|Relative Permittivity εr||900*|
|Piezoelectric Constant d31||220 pm/V*|
|Wafer Size||4•5•6•8 inch|
|Wafers||Si wafer or SOI wafer|
|Available processes||PZT Sputtering, Lower & Upper electrode sputtering, Precise patterning|
|Inspection||Film thickness||Film thickness measurement by SEM|
|Orientation||Axis inspection with XRD|
*The above Relative Permittivity εr and Piezoelectric Constant d31 are typical values for 3μｍ thickness PZT after Polarization